After the wafer cassette is placed on the load port, press the start button to open the wafer cassette, and the wafer in the cassette is scanned by the sensor on the robot arm, and the wafer is taken out by the robot arm according to the scanned content. The camera reads the ID on the wafer while it is placed on the edge finder for positioning, and the wafer is placed in the wafer BOX box

The ID camera is used to read the content on the wafer. If the wafer content is not read on the front side, rotate to prevent the motor from rotating to a safe position. After not interfering with the wafer, turn the cylinder over the ID camera to read the back side of the wafer.